A 3D Virtual Reactor for Simulation of Silicon-Based Film Production

Authors
Publication date 2004
Book title Proceedings of the 5th International Bi-Annual ASME/JSME Symposium on Computational Technologies forFluid/Thermal/Structural/Chemical Systems with Industrial Applications
ISBN
  • 0791846865
  • 9780791846865
Event ASME/JSME PVP Conference. San Diego, California USA
Volume | Issue number 491-2
Pages (from-to) 59-68
Organisations
  • Faculty of Science (FNWI) - Informatics Institute (IVI)
Document type Conference contribution
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