Shallow thermal donors associated with H, Al and N in annealed Czochralski silicon distinguished by infrared spectroscopy

Authors
  • R.E. Pritchard
  • M.J. Ashwin
  • J.H. Tucker
  • R.C. Newman
  • E.C. Lightowlers
  • T. Gregorkiewicz
  • I.S. Zevenbergen
  • C.A.J. Ammerlaan
  • R. Falster
  • M.J. Binns
Publication date 1997
Journal Semiconductor Science and Technology
Volume | Issue number 12
Pages (from-to) 1404-1408
Organisations
  • Faculty of Science (FNWI) - Institute of Physics (IoP) - Van der Waals-Zeeman Institute (WZI)
Document type Article
Language English
Published at https://doi.org/10.1088/0268-1242/12/11/012
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