Shallow thermal donors associated with H, Al and N in annealed Czochralski silicon distinguished by infrared spectroscopy
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| Publication date | 1997 |
| Journal | Semiconductor Science and Technology |
| Volume | Issue number | 12 |
| Pages (from-to) | 1404-1408 |
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| Document type | Article |
| Language | English |
| Published at |
https://doi.org/10.1088/0268-1242/12/11/012
(Final published version)
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