Сравнение двух моделей плазмохимических процессов при осаждении нитрида Кемния
| Authors |
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|---|---|
| Publication date | 2011 |
| Host editors |
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| Book title | ХL Неделя науки СПбГПУ |
| Book subtitle | материалы международной научно-практической конференции |
| Event | International conference "The 40th Science Week" |
| Volume | Issue number | 6 |
| Pages (from-to) | 132-134 |
| Publisher | Sankt-Peterburg: Sankt-Peterburgskii gosudarstvennyi politekhnicheskii universitet |
| Organisations |
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| Document type | Conference contribution |
| Language | Russian |
| Published at | |
| Downloads |
2011 Polytech Science Week_132
(Final published version)
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| Permalink to this page | |
